Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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|-style="background:#DCDCDC;" align="center" | |-style="background:#DCDCDC;" align="center" | ||
|align="left"| Silicon with native oxide || (x) || x || | |align="left"| Silicon with native oxide || (x) || x || x || (x) | ||
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|-style="background:#C0C0C0;" align="center" | |-style="background:#C0C0C0;" align="center" | ||
|align="left"|Silicon oxide || (x) || || | |align="left"|Silicon oxide || (x) || || x || (x) | ||
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|-style="background:#DCDCDC;" align="center" | |-style="background:#DCDCDC;" align="center" | ||
|align="left"| Silicon nitride || (x) || || | |align="left"| Silicon nitride || (x) || || x || (x) | ||
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|} | |} | ||