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Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions

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|-style="background:#DCDCDC;" align="center"
|-style="background:#DCDCDC;" align="center"
|align="left"| Silicon with native oxide || (x) || x || X || (x)
|align="left"| Silicon with native oxide || (x) || x || x || (x)
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|-style="background:#C0C0C0;" align="center"
|-style="background:#C0C0C0;" align="center"
|align="left"|Silicon oxide || (x) ||  || X || (x)
|align="left"|Silicon oxide || (x) ||  || x || (x)
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|-
|-style="background:#DCDCDC;" align="center"
|-style="background:#DCDCDC;" align="center"
|align="left"| Silicon nitride || (x) ||  || X || (x)
|align="left"| Silicon nitride || (x) ||  || x || (x)
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