Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions
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The limited amount of chromium, the nature of deposition (in all directions) and retruction sets a limit on how thick layer can be deposited. We do not recomend to exeed the thickness above 80 nm, and do not allow thicknesses above 100 nm. | |||
Note! <b>Remember to discard the used tungsten rods. Never reinstall them. Always mount a new source.</b> | Note! <b>Remember to discard the used tungsten rods. Never reinstall them. Always mount a new source.</b> | ||