Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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The list of recipes currently in the 'std' folder is: | The list of recipes currently in the 'std' folder is: | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchgentle | barc etch gentle ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchgentle | A barc etch gentle ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchstrip | barc etch strip ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchstrip | A barc etch strip ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Cretch | Cr etch ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Cretch | Cr etch ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OREt1 | ORE t1 ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OREt1 | The CORE process that has now been renamed to ORE t1 ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | polySi etch hard mask ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | A polySi etch hard mask ]] | ||
=== Previous work on Pegasus 2 === | === Previous work on Pegasus 2 === | ||