Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | polySi etch hard mask ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | polySi etch hard mask ]] | ||
=== | === Previous work on Pegasus 2 === | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2 ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2 ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand|Black silicon on Demand]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand|Black silicon on Demand]] | ||