Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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If you want to get access to the tool, then talk to professor Henry Jansen | If you want to get access to the tool, then talk to professor Henry Jansen | ||
== Current setup and rules on Pegasus 2 == | == Current setup and rules on Pegasus 2 == | ||
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New recipes are being developed all the time and the total number of recipes on the tool is huge. However, as the configuration of the instrument changes over time a vast majority of the recipes may no longer be safe to run. Unless you have specific permission to run other recipes, the only recipes that you can safely run are the ones in the 'std' folder. If you have your own recipe folder, always verify that the recipe you want to run is present in the 'std' folder. | New recipes are being developed all the time and the total number of recipes on the tool is huge. However, as the configuration of the instrument changes over time a vast majority of the recipes may no longer be safe to run. Unless you have specific permission to run other recipes, the only recipes that you can safely run are the ones in the 'std' folder. If you have your own recipe folder, always verify that the recipe you want to run is present in the 'std' folder. | ||
=== The recipes in the 'std' folder === | |||
The list of recipes currently in the 'std' folder is: | The list of recipes currently in the 'std' folder is: | ||
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* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OREt1 | ORE t1 ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OREt1 | ORE t1 ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | polySi etch hard mask ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | polySi etch hard mask ]] | ||
=== Processes on Pegasus 2 === | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2 ]] | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand|Black silicon on Demand]] | |||