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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 22: Line 22:
|ItemName= Available gasses and gas chemistry
|ItemName= Available gasses and gas chemistry
|ItemConfiguration=  
|ItemConfiguration=  
* SF6: 50 sccm
 
* SF<sub>6</sub>: 50 sccm
* O2: 50 sccm
* O2: 50 sccm
* Ar: 283 sccm
* Ar: 283 sccm
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