Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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|ItemName= Available gasses and gas chemistry | |ItemName= Available gasses and gas chemistry | ||
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| colspan="3"| C<sub>4</sub>F<sub>8</sub> (H2 currently fitted but closed) : 0 sccm | | colspan="3 "| C<sub>4</sub>F<sub>8</sub> (H2 currently fitted but closed) : 0 sccm | ||
|- | |- | ||
| SF6: 50 sccm | | SF6: 50 sccm | ||