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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3: Difference between revisions

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'''Hardware changes'''
'''Hardware changes'''


A few hardware modifications have been made on the Pegasus 3/4 since it was installed in 2019. The changes are listed below.
Compared to a standard SPTS DRIE Pegasus chamber, the Pegasus 3 has had the same modifications as the Pegasus 1 with the exception of the Claritas EPD system. The changes are listed below.


*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/showerheadchange|Change of showerhead in 2019]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|Change of Pegasus 1 showerhead in 2019]]


*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/picoscope|Addition of Picoscope oscilloscope system for process monitoring in February 2019]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Addition of Picoscope oscilloscope system for process monitoring on Pegasus 1 in February 2019]]




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