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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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!colspan="2" border="none" style="background:silver; color:black;" align="center" width="200"|Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center" width="150"|Equipment  
|style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| '''DRIE-Pegasus 1''']]
|style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| '''DRIE-Pegasus 1''']]
|style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| '''DRIE-Pegasus 2''']]
|style="background:silver; color:black" width="250" align ="center" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| '''DRIE-Pegasus 2''']]