Specific Process Knowledge/Characterization/Profiler: Difference between revisions
m →Quality control of measurement accuracy: added info on confidence interval |
m →Quality control of measurement accuracy: confidence interval added for step height |
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If two consecutive measurements for a range are outside the action limit, the range should be calibrated. | If two consecutive measurements for a range are outside the action limit, the range should be calibrated. | ||
The confidence interval on the step height is given as twice the standard deviation, or 95 % confidence intervals. | |||
==Optical Profiler (Sensofar)== | ==Optical Profiler (Sensofar)== | ||