Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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===Demonstrating roughness measurements on silicon=== | ===Demonstrating roughness measurements on silicon=== | ||
====ScanAsyst with ScanAsyst-air==== | |||
*CL on | |||
*512x512 | |||
*0dg | |||
*ScanAsyst noise threshold: 1 | |||
*PeakForce amplitide 300 nm | |||
*Peak force frequency: 2 Hz | |||
*Rq: 0.247 nm | |||
[[File:Roughness on Si 1 ScanAsyst with ScanAsyst-air CL on.JPG|400px]] | [[File:Roughness on Si 1 ScanAsyst with ScanAsyst-air CL on.JPG|400px]] | ||
====ScanAsyst with ScanAsyst-air==== | |||
*CL off | |||
*512x512 | |||
*0dg | |||
*ScanAsyst noise threshold: 0.2 | |||
*PeakForce amplitide 300 nm | |||
*Peak force frequency: 2 Hz | |||
*Rq: 0.235 nm | |||
[[File:Roughness on Si 2 ScanAsyst with ScanAsyst-air CL off.JPG|400px]] | [[File:Roughness on Si 2 ScanAsyst with ScanAsyst-air CL off.JPG|400px]] | ||
====ScanAsyst with TAP150A==== | |||
*CL on | |||
*512x512 | |||
*0dg | |||
*ScanAsyst noise threshold: 1 | |||
*PeakForce amplitude 75 nm (was set as standard from the probe settings) | |||
*Peak force frequency: 2 Hz | |||
*Rq: 0.238/0.250 nm | |||
[[File:Roughness on Si 3 ScanAsyst with TAP150A CL on A.JPG|400px]][[File:Roughness on Si 3 ScanAsyst with TAP150A CL on B.JPG|400px]] | [[File:Roughness on Si 3 ScanAsyst with TAP150A CL on A.JPG|400px]][[File:Roughness on Si 3 ScanAsyst with TAP150A CL on B.JPG|400px]] | ||
====Tapping mode with TAP150A==== | |||
*CL on | |||
*512x512 | |||
*0dg | |||
*Rq: 0.214 nm | |||
[[File:Roughness on Si 4 Tapping mode with TAP150A CL on.JPG|400px]] | [[File:Roughness on Si 4 Tapping mode with TAP150A CL on.JPG|400px]] | ||
====Tapping mode with RFESP-75==== | |||
*CL on | |||
*512x512 | |||
*0dg | |||
*Rq: 0.224 nm | |||
[[File:Roughness on Si 5 Tapping mode with RFESP-75 CL on.JPG|400px]] | [[File:Roughness on Si 5 Tapping mode with RFESP-75 CL on.JPG|400px]] | ||