Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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If you want to get access to the tool, then take to professor Henry Jansen | If you want to get access to the tool, then take to professor Henry Jansen | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2 ]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2 ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Si Nano Etching|Black silicon on Demand]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano Etching|Black silicon on Demand|Si Nano Etching|Black silicon on Demand]] | ||