Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching: Difference between revisions

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Below are images illustrating works that have been done during the ph.d. projects.
Below are images illustrating works that have been done during the ph.d. projects.
<gallery caption="" widths="380px" heights="300px" perrow="3">
<gallery caption="" widths="380px" heights="300px" perrow="3">
image:3D_PhC.png| 1. 3D silicon photonic crystal membranes.  
image:3D.png| 1. 3D silicon photonic crystal membranes.  
image:Scallops.png| 2. Comparison of scallops by traditional Bosch process and modified DREM process.
image:Scallops.png| 2. Comparison of scallops by traditional Bosch process and modified DREM process.
image:3Dmicro.png| 3. 3D silicon microstructures fabricated by DREM process.
image:3Dmicro.png| 3. 3D silicon microstructures fabricated by DREM process.

Revision as of 13:13, 10 May 2020

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Below are images illustrating works that have been done during the ph.d. projects.

  • 1. 3D silicon photonic crystal membranes.
    1. 3D silicon photonic crystal membranes.
  • 2. Comparison of scallops by traditional Bosch process and modified DREM process.
    2. Comparison of scallops by traditional Bosch process and modified DREM process.
  • 3. 3D silicon microstructures fabricated by DREM process.
    3. 3D silicon microstructures fabricated by DREM process.
  • 4. 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
    4. 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
  • 5. 3D silicon stacked nanowires for structural color generation.
    5. 3D silicon stacked nanowires for structural color generation.
  • 6. High aspect ratio silicon micropillars fabricated with DREM process.
    6. High aspect ratio silicon micropillars fabricated with DREM process.
  • 7. ZIF-8 crystals for tunable structural colors.
    7. ZIF-8 crystals for tunable structural colors.
  • 8. Using OES to monitor the fluorocarbon film deposition with Pegasus 1.
    8. Using OES to monitor the fluorocarbon film deposition with Pegasus 1.
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