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'''Feedback to this page''': '''[mailto:Characterization@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/Profiler&action=edit click here]'''  
'''Feedback to this page''': '''[mailto:Characterization@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler click here]'''  


[[Category: Equipment|Characterization Profiler]]
[[Category: Equipment|Characterization Profiler]]
[[Category: Characterization|Profiler]]
[[Category: Characterization|Profiler]]
==Overview of the Nanolab profilers==
All the profilers are compared on the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page.
The sections below describe each profiler in more detail.




==Dektak XTA stylus profiler==
==Dektak XTA stylus profiler==


The Dektak XTA stylus profiler from Brüker is usable for profiling surfaces of samples with structures in the micro- and nanometer range. However, the size of the structures that can be measured is limited by the tip dimensions.
The Dektak XTA stylus profiler from Brüker is used for profiling surfaces of samples with structures in the micro- and nanometer range. The size of the structures that can be measured is limited by the tip dimensions.


A profil measurement can be done in a specific point by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. [[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] of thin films can be done by measuring the wafer bow.
A profile measurement can be done across a specific structure by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. [[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] of thin films can be done by measuring the wafer bow.




'''The user manual(s), quality control procedure(s) and results, technical information and contact information can be found in LabManager:'''  
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=304 Dektak XTA in LabManager]
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=304 Dektak XTA in LabManager]
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[[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in cleanroom  F-2.]]
[[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in cleanroom  F-2.]]


Dektak 8 stylus profiler is a product of Veeco Instruments. It is usable for profiling surfaces of samples with structures in the micro- and nanometer range. However, the size of the structures that can be measured is limited by the tip dimensions.
Dektak 8 stylus profiler is a product of Veeco Instruments. It is used for profiling surfaces of samples with structures in the micro- and nanometer range. The size of the structures that can be measured is limited by the tip dimensions.
It can measure in a specific point found with help from  high magnification video cameras or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] of thin films by measuring the wafer bow.
 
It can measure specific structures found with the help of a high magnification video camera or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] of thin films by measuring the wafer bow.


To get some product information and some tips and tricks from the vendor take a look at Veeco's homepage [http://www.veeco.com/products/details.php?cat=1&sub=6&pid=32]
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'''The user manual(s), quality control procedure(s) and results, technical information and contact information can be found in LabManager:'''  
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  


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[[image:III-V profiler.JPG|300x300px|right|thumb|The profiler placed in 346-904 (Dektak 3ST).]]
[[image:III-V profiler.JPG|300x300px|right|thumb|The profiler placed in 346-904 (Dektak 3ST).]]


The Dektak 3ST is intended for profile measurements on sample outside the cleanroom.  
The Dektak 3ST is intended for profile measurements on samples outside the cleanroom.  




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==Comparing the profilers==
Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Profiler"