Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions
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Revision as of 15:10, 3 April 2020
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Zeiss Jenatech (strain) | Nikon SMZ 1500 | Leica S8 APO | Leitz Medilux | Zeiss Axiotron 2 | Zeiss Jenatech (particles measurements) | Noco IR microscope | Nikon SMZ 1000 | Nikon ME 600 | Nikon Eclipse L200 | Nikon Eclipse L200 (2) | Nikon ECLIPSE L200N 3 | Nikon ECLIPSE L200N 4 | |
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Location | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager | Check LabManager |
Special features | Wollastron prism | Stereoscopic microscope | Stereoscopic microscope | No | No | No | Infra red (IR) camera | Stereoscopic microscope | Wollastron prism | Motorized stage | No | No | No |
Ocular magnification | 10x | No | No | 10x | 10x | 10x | 10x | No | 10x | 10x | 10x | 10x | 10x |
Objective magnification | 2.5x, 5x, 10x, 20x, 50x | Zoom 100x | Zoom 80x | 2.5x, 5x, 10x, 20x, 50x | 5x, 10x, 20x, 50x | 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 20x, 50x | Zoom 100x | 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 10x, 20x, 50x, 100x | 2.5x, 5x, 10x, 20x, 50x, 100x |
Bright field | Yes | No | No | Yes | Yes | Yes | Yes | No | Yes | Yes | Yes | Yes | Yes |
Dark field | Yes | No | No | No | Yes | Yes | No | No | Yes | Yes | Yes | Yes | Yes |
Polarizer | Yes | No | No | No | No | Yes | No | No | Yes | No | No | No | No |
Episcopic light (reflected light) | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes |
Diascopic light (transmitted light) | No | Yes | No | Yes | Yes | No | Yes | No | No | Yes | Yes | Yes | Yes |
View with eye | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes |
View on screen (camera) | Yes | No | No | Yes | Yes | No | Yes (IR) | No | Yes | Yes | Yes | Yes | Yes |
Measurement option | No | No | No | No | Yes | No | No | No | No | Yes | Yes | Yes | Yes |
It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage Nikon Eclipse L200 auto scan guide
THIS PAGE IS UNDER CONSTRUCTION
Microscope | Location | Responsible Group | Objectives | Ocular | Special features | Features | Camera | Analysis software |
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Nikon SMZ 1000 | 346-901 | Wet chemistry | Zoom 0.8x - 8x | 10x | Stereoscopic microscope | Episcopic | No | No |
Noco IR | 346-901 | Wet chemistry |
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10x | IR imaging |
|
IR camera | No |
Leica INM100 | 346-901 | Wet chemistry |
|
10x |
|
DS-Fi2 | NIS-D | |
Nikon Eclipse L200 #2 | C1 | Thin Film |
|
10x |
|
DS-Fi1 | NIS-D | |
Zeiss Jenatech | C1 | Thin Film |
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10x |
|
No | No | |
Nikon Eclipse L200 #1 | D3 | Thin Film |
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10x |
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DS-Fi1 | NIS-BR |
Leitz Medilux | D3 | Thin Film |
|
10x |
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DX40-274FW | Kappa Control Center | |
Nikon Eclipse L200N #3 | E4 | Lithography |
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10x |
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NIS-D | |
Nikon Eclipse L200N #4 | E5 | Lithography |
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10x |
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NIS-D | |
Nikon ME 600 | F1 | Thin Film |
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10x |
|
DS-Fi2 | NIS-D | |
Leica S8 APO | F2 | Thin Film | Zoom 1x - 8x | 10x | Stereoscopic microscope | Episcopic | No | No |
Zeiss Axiotron | F3 | Lithography |
|
10x |
|
Infinity X | DeltaPix |
THIS PAGE IS UNDER CONSTRUCTION
Nikon SMZ 1000 | Noco IR | Leica INM 100 | Nikon Eclipse L200 #2 | Zeiss Jenatech | Nikon Eclipse L200 #1 | Leitz Medilux | Nikon Eclipse L200N #3 | Nikon Eclipse L200N #4 | Nikon ME 600 | Leica S8 APO | Zeiss Axiotron | |
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Location | 346-901 | 346-901 | 346-901 | C1 | C1 | D3 | D3 | E4 | E5 | F1 | F2 | F3 |
Responsible group | Wet chemistry | Wet chemistry | Wet chemistry | Thin Film | Thin Film | Thin Film | Thin Film | Lithography | Lithography | Thin Film | Thin Film | Lithography |
Objectives | Zoom 0.8x - 8x |
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Zoom 1x - 8x |
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Ocular | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x | 10x |
Special features | Stereoscopic microscope | IR imaging |
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Stereoscopic microscope | ||||||||
Contrast mechanisms |
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Illumination modes |
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Camera | None | IR camera | DS-Fi2 | DS-Fi1 | None | DS-Fi1 | DX40-274FW |
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DS-Fi2 | None | Infinity X |
Analysis software | None | None | NIS-D | NIS-D | None | NIS-BR | Kappa Control Center | NIS-D | NIS-D | NIS-D | None | DeltaPix |