Specific Process Knowledge/Back-end processing/FlexScribe: Difference between revisions

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The Cleaver: FlexScribe is designed for cleaving large wafers into smaller pieces from the frontside. Hence it will leave particles on the frontside of the sample. It works by running a "pizza wheel" over the sample and then breaking it in two by using a pair of pliers. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: Flex Scribe should always be placed inside Fume hood 5.
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/FlexScribe click here]'''
 
The Cleaver: FlexScribe is a scriber designed for cleaving/scribing large wafers into smaller pieces from the frontside. Hence it will leave particles on the frontside of the sample. It works by running a "pizza wheel" over the sample and then breaking it in two by using a pair of pliers.  
 
The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: Flex Scribe should always be placed inside Fume hood 5.


[[File:flexscribe.JPG|400px]]
[[File:flexscribe.JPG|400px]]
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*Sapphire
*Sapphire


The Flex Scribe can cleave samples from 100mm down to ~10mm, please contact wetchemistry group for more information
The Flex Scribe can cleave samples from 150mm down to ~10mm, please contact wetchemistry group for more information
 
DTU-Nanolab has 3 different types of Cleavers see the Labadviser pages for the '''[http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/FlipScribe FlipScribe]''' and the '''[http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Back-end_processing/LatticeAxe LatticeAxe]''' for more information.

Revision as of 07:59, 21 April 2020

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The Cleaver: FlexScribe is a scriber designed for cleaving/scribing large wafers into smaller pieces from the frontside. Hence it will leave particles on the frontside of the sample. It works by running a "pizza wheel" over the sample and then breaking it in two by using a pair of pliers.

The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: Flex Scribe should always be placed inside Fume hood 5.

Approved Materials:

  • Si
  • Quartz
  • Pyrex (Borofloat 33)
  • GaAs
  • InP
  • Sapphire

The Flex Scribe can cleave samples from 150mm down to ~10mm, please contact wetchemistry group for more information

DTU-Nanolab has 3 different types of Cleavers see the Labadviser pages for the FlipScribe and the LatticeAxe for more information.