Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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| style="background:lightgrey; color:black" | 2010 | | style="background:lightgrey; color:black" | 2010 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 2010 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 2010 | ||
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! style="background:Whitesmoke; color:black" | Serial | ! style="background:Whitesmoke; color:black" | Serial | ||
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* [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]] | ||
| style="background:WhiteSmoke; color:black"| | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Picoscope oscilloscope]] | ||
| style="background:WhiteSmoke; color:black"| | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]] | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Picoscope oscilloscope]] | |||
| style="background:WhiteSmoke; color:black"| ? | | style="background:WhiteSmoke; color:black"| ? | ||
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