Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 29: | Line 29: | ||
== The Bosch process == | == The Bosch process == | ||
The DRIE Pegasus tools are state-of-art silicon dry etchers that offer outstanding performance in terms of etch rate, uniformity etc. They use the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] to access | The DRIE Pegasus tools are state-of-art silicon dry etchers that offer outstanding performance in terms of etch rate, uniformity etc. They use the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] to access the top of the page. The contents are: | ||
# [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description#Description_of_the_Bosch_process_at_the_DRIE-Pegasus| Description of the Bosch process ]] | |||
# [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description#Processing_options_on_the_Pegasus | Processing options on the Pegasus ]] | |||
# [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description#Modification_of_the_showerhead | Modification of the showerhead ]] | |||
# [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description#RF_Matching | RF matching ]] | |||
## [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description#RF_matching_in_general | RF matching in general ]] | |||
## [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description#Why_RF_matching_is_extremely_important_in_the_Bosch_process | Why RF matching is extremely important in the Bosch process ]] | |||
for more fundamental information of the system. As of 2017, completing the [[LabAdviser/Courses/TPT_Dry_Etch| Dry Etch TPT course]] is mandatory for all new users. | for more fundamental information of the system. As of 2017, completing the [[LabAdviser/Courses/TPT_Dry_Etch| Dry Etch TPT course]] is mandatory for all new users. | ||