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{| border="2" cellspacing="0" cellpadding="0"  
{| border="2" cellspacing="0" cellpadding="0"  
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment  
|style="background:WhiteSmoke; color:black" align="center"|QFEG Cryo SEM FEI Quanta FEG 200
|style="background:WhiteSmoke; color:black" align="center"|'''"Nova"''' FEI Nova nanoSEM 600
|-
|-
!style="background:silver; color:black;" align="center" width="60"| Purpose  
!style="background:silver; color:black;" align="center" width="60"| Purpose  
|style="background:LightGrey; color:black" "rowspan="2"| Vizualization and Microanalysis
|style="background:LightGrey; color:black" "rowspan="2" align="center"| Visualisation and Microanalysis
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Vizualization of surfaces (topography and Z contrast)  
* Visualisation of surfaces (topography and Z contrast)  
* Vizualization of projected image (BF STEM image)
* Visualisation of projected image (BF STEM image)
* Energy Dispersive X-ray analysis (EDS)
* Energy Dispersive X-ray analysis (EDS)
*Microstructural characterisation (EBSD/TKD/STEM)
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
|style="background:LightGrey; color:black" rowspan="2"|Resolution
|style="background:LightGrey; color:black" rowspan="2" align="center"|Resolution
|style="background:Whitesmoke; color:black" colspan="1" align="left"|The resolution of QFEG dependends on the sample and the operation mode!
|style="background:Whitesmoke; color:black" colspan="1" align="center"|The resolution of Nova depends on the sample and is in Mode II
|-
|-
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* 2 nm at 30 keV for Au on C sample with the ETD detector
*High Vacuum operation in Mode II:
**1.0 nm at 15 kV (TLD detector and optimum working distance)
**1.8 nm at 1 kV (TLD detector and optimum working distance)
*Low Vacuum operation in Mode II:
**1.5 nm at 10 kV (Helix detector and optimum working distance)
**1.8 nm at 3 kV (Helix detector and optimum working distance)1 nm at  15keV for Au on C sample with the TLD detector
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="7"|Instrument specifics
!style="background:silver; color:black" align="center" valign="center" rowspan="7"|Instrument specifics
|style="background:LightGrey; color:black"|Detectors
|style="background:LightGrey; color:black" align="center"|Detectors
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* ETD- Everhart-Thornley for secondary electrons
* ETD- Everhart-Thornley for secondary electrons
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* CCD camera  
* CCD camera  
|-
|-
|style="background:LightGrey; color:black"|Electron source
|style="background:LightGrey; color:black" align="center"|Electron source
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Field Emission - Tungsten filament
* Field Emission - Tungsten filament
|-
|-
|style="background:LightGrey; color:black"|Stage (room temperature)
|style="background:LightGrey; color:black" align="center"|Stage
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* X, Y: 25 × 25 mm
* X, Y: 75 × 75 mm (piezo)
* T: 0 to 60<sup>o</sup> (Full tilt require removment of cryo cold trap.)
* Z 10mm (DC motor)
* R: 360<sup>o</sup>  
* T: 0 to 70<sup>o</sup> (DC motor)
* R: 360<sup>o</sup> (piezo)
|-
|-
|style="background:LightGrey; color:black"|Peltier stage  
|style="background:LightGrey; color:black" align="center"|Peltier stage  
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* FEI Peltier stage -10<sup>o</sup> to 22<sup>o</sup>
* FEI Peltier stage -10<sup>o</sup> to 22<sup>o</sup>
|-
|-
|style="background:LightGrey; color:black"|Cryo stage
|style="background:LightGrey; color:black" align="center"|EBSD/TKD
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Quorum PP2000 Cryo System
* Bruker eFlash
|-
|-
|style="background:LightGrey; color:black"|EDS  
|style="background:LightGrey; color:black" align="center"|EDS  
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Oxford Instruments 80 mm<sup>2</sup> X-Max silicon drift detector, MnKα resolution at 124 eV
* Bruker 50 mm<sup>2</sup> silicon drift detector, MnKα resolution at 124 eV
|-
|-
|style="background:LightGrey; color:black"|Operating pressures
|style="background:LightGrey; color:black" align="center"|Operating pressures
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* High vacuum (10<sup>-4</sup> Pa), Low vacuum and Enviromental mode (up to 2700Pa)
* High vacuum (10<sup>-4</sup> Pa), Low vacuum mode (up to 130Pa)
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
|style="background:LightGrey; color:black"|Sample sizes
|style="background:LightGrey; color:black" align="center"|Sample sizes
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* No actual limit (limitted by stage movment and detector position).
* No actual limit (limitted by stage movment and detector position).
|-
|-
| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black" align="center"|Allowed materials
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)
* Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)
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=Characterization Techniques=
=Characterization Techniques=
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