Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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Results of the study may be found here: | Results of the study may be found here: | ||
*[[Specific Process Knowledge/Thin film deposition/Lesker/Stress dependence on sputter parameters in the Lesker sputter system|Stress under different sputter parameters]]. | *[[Specific Process Knowledge/Thin film deposition/Lesker/Stress dependence on sputter parameters in the Lesker sputter system|Stress under different sputter parameters]]. | ||
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==List of available targets for the Sputter-System(Lesker) (03 June 2013)== | ==List of available targets for the Sputter-System(Lesker) (03 June 2013)== | ||