Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*Backside Alignment | *Backside Alignment | ||
*Advanced Field Alignment Mode for alignment to individual chips/devices on the substrate | *Advanced Field Alignment Mode for alignment to individual chips/devices on the substrate | ||
*Separate conversion PC (Power PC) | |||
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=464 LabManager] | Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=464 LabManager] | ||