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→Sputtering of Aluminium: added cluster based sputter system
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==Sputtering of Aluminium==
==Sputtering of Aluminium==


Aluminium may be sputter deposited in either Wordentec or the Lesker sputter systems.
Aluminium may be sputter deposited in either the Wordentec, the [[Specific Process Knowledge/Thin film deposition/Lesker|Sputter-system (Lesker)]] or the [[Specific_Process_Knowledge/Thin_film_deposition/Cluster-based_multi-chamber_high_vacuum_sputtering_deposition_system#Process_information
|Cluster-based sputter system]].


*[[/Sputter rates for Al|Sputtering of Aluminium in Wordentec]]
*[[/Sputter rates for Al|Sputtering of Aluminium in the Wordentec]]


==E-beam evaporation of Aluminium==
==E-beam evaporation of Aluminium==
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