Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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The picoscopes installed on Pegasus 1, 2 and 3 all have the same setup. | The picoscopes installed on Pegasus 1, 2 and 3 all have the same setup. | ||
== Optimizing recipes with Picoscope == | |||
Continuous processes do not benefit from the Picoscope in the same way that Bosch processes do. This is why we did not install a Picoscope on Pegasus 3 that runs continuous etch processes of dielectrics. The choice of using the Picoscope on Bosch processes, however, is somewhat like studying biology samples with or without the optical microscope. So many details in the etch processes are invisible without the Picoscope that it becomes meaningless to do anything without it. | |||
The downside of having a much more detailed view of the process is that it is very time consuming to arrive a minimum of reflected powers. | |||
= New recipes= | = New recipes= | ||