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Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions

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Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,760 edits
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|Thickness deviation across a 4" wafer
|Thickness deviation across a 4" wafer
|+/- 5 %
|± 5 %
|-
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|Deposition rate deviation
|Deposition rate deviation
|+/- 20 %
|± 20 %
|-
|-
|}
|}
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