Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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== Picoscope examples == | == Picoscope examples == | ||
Using the Picoscope is straightforward. The Start/Stop recording buttons are located in the lower left corner of the GUI; the recording has to be done manually. | Using the Picoscope is straightforward. The Start/Stop recording buttons are located in the lower left corner of the GUI; the recording has to be done manually. Below is a typical screen dump of the GUI from a process run. | ||
[[image: | [[image:Picodump2.png|800px]] | ||
One can adjust several parameters: | |||
* Collection time: Here, it is 5 seconds per division, can also be 10 seconds per division | |||
* Number of samples: The lowest sampling rate (50 S) is still much, much faster than the SPTS Pro software. | |||
The settings for the channels are listed below: | |||
{| {{table}} | {| {{table}} | ||
{| border="1" cellspacing="0" cellpadding="1" align="center" | {| border="1" cellspacing="0" cellpadding="1" align="center" | ||
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! Measurement | ! Measurement | ||
! Measurement range | ! Measurement range | ||
|- | |||
| Fixed | |||
| Fixed | |||
| Fixed | |||
| Adjustable | |||
|- | |- | ||
! A | ! A | ||