Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

@@ Line 136: / Line 136: @@
 == Picoscope examples ==
-Using the Picoscope is straightforward. The Start/Stop recording buttons are located in the lower left corner of the GUI; the recording has to be done manually. The settings in the top of the GUI
+Using the Picoscope is straightforward. The Start/Stop recording buttons are located in the lower left corner of the GUI; the recording has to be done manually. The settings in the top of the GUI may look like this
+[[image:Picodump.png|800px]]
-[[image:PicoSetup.PNG|700px]]
-are usually:
+{| {{table}}
+{| border="1" cellspacing="0" cellpadding="1"  align="center"
+! colspan="3" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/processD#The_new_standard_process_Process_D4 |Process D4 ]]
+|-
+! Channel
+! Label
+! Measurement
+! Measurement range
+|-
+! A
+| SF<sub>6</sub>
+| DC
+| ±10V
+|-
+! B
+| SF<sub>6</sub>2.2
+| 1
+|-
+! Pressure (mtorr)
+| 26
+| 20
+|-
+! Coil power (W)
+| 2500
+| 2000
+|-
+! Platen power (W)
+| 35
+| 0
+|-
+! Common
+| colspan="2" | Temperature 0 degs
+|-
+|}
 = New recipes=