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Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

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The group of professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab has researched the possibilities  
The group of professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab has researched the possibilities  


 
*[[:file:DREM1.pdf]]
[file:DREM2 - Chang_2018_J._Micromech._Microeng._28_105012.pdf]
*[[:file:DREM2.pdf]]
*[[:file:CORE1.pdf]]
*[[:file:3DnanoSi.pdf]]
*[[:file:Grassfree1.pdf]]