Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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What to do about this? | What to do about this? | ||
== How to improve this == | |||
Minimizing the reflected power is essential to ensure that the instrument hardware doesn't degrade over time and that the users have accurate information about the processes. Realizing that there may be a challenge with detecting reflected powers we need to decide what to do. We can abandon all processes and start developing new ones - this will halt all processing. Instead, a set of new recipes will be developed. | Minimizing the reflected power is essential to ensure that the instrument hardware doesn't degrade over time and that the users have accurate information about the processes. Realizing that there may be a challenge with detecting reflected powers we need to decide what to do. We can abandon all processes and start developing new ones - this will halt all processing. Instead, a set of new recipes will be developed. | ||