Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 186: | Line 186: | ||
| | | | ||
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for KS Aligner]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for KS Aligner]<br> | ||
*[https://labmanager.dtu.dk/view_binary.php?type= | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=44 The newest QC data for KS Aligner] | ||
{| {{table}} | {| {{table}} | ||
| align="center" | | | align="center" | | ||