Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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</gallery> | </gallery> | ||
One can see the multiplexing of the Bosch process by alternation of the gas flows of | One can see the multiplexing of the Bosch process by alternation of the gas flows of | ||
<span style="color:#FFFFFF; background:blue">SF<sub>6</sub></span> and <span style="background:red">C<sub>4</sub>F<sub>8</sub></span> | <span style="color:#FFFFFF; background:blue">SF<sub>6</sub></span> (that has flow initially at 350 sccm for the first 1.5 second then 550 sccm for 5.5 seconds in the etch phase) and <span style="background:red">C<sub>4</sub>F<sub>8</sub></span> (at 200 sccm in the dep phase) | ||
<gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | ||
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[[Image:PrD4 SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | [[Image:PrD4 SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | ||
[[Image:Process A pico.png |frame|right|x500px|4 cycles of the recipe | [[Image:Process A pico.png |frame|right|x500px|4 cycles of the recipe Process A recorded with the Picoscope]] | ||
[[Image:Process A SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | [[Image:Process A SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | ||