Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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= Process optimization using the Picoscope = | = Process optimization using the Picoscope = | ||
Before going into details on why it makes sense to optimize the processes using the picoscope process monitoring, we need to have a look at how this is usually done. | |||
== Standard process parameter monitoring == | |||
The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below: | The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below: | ||