Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=339 The QC procedure for Aligner: MA6-2]<br> | ||
*[http://labmanager.dtu.dk/view_binary.php?fileId= | *[http://labmanager.dtu.dk/view_binary.php?fileId=4227 The newest QC data for Aligner: MA6-2] | ||
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Power supply and/or lamp will be adjusted if intensity is outside the limit. | Power supply and/or lamp will be adjusted if intensity is outside the limit. | ||
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====Alignment==== | ====Alignment==== | ||