Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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[[Category: Equipment |Etch DRIE]] | |||
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= Process optimization using the Picoscope = | = Process optimization using the Picoscope = | ||
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When running any recipe on theSPTS Pro software | |||
Using the SPTS Pro soft | |||
<gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||