Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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|Depending on [[/Sputter rates for Al|process parameters]], up to ~2.5 Å/s | |Depending on [[/Sputter rates for Al|process parameters]], up to ~2.5 Å/s | ||
|~1.5Å/s to 2Å/s | |~1.5Å/s to 2Å/s | ||
|1 Å/s | |0.5, 1, or 2 Å/s | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||