Specific Process Knowledge/Back-end processing/Hot Embosser: Difference between revisions

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| style="background:LightGrey; color:black"|Allowed materials
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*Allowed material 1
*PMMA
*Allowed material 2
*TOPAS 5013-L10
*TOPAS 8007
*PC
*PP
*PCL
*SU8
*Graphene
*Metals (Al,Ni....)
*For other materials contact for machine responsible personel
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Revision as of 11:40, 26 February 2020

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Name of equipment

Write a short description of the equipment(s).

File:Cluster1.jpg
Image(s) of the equipment(s)


The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:

Hot Embosser in LabManager

Process information

Link to process pages - e.g. one page for each material

Example:

Equipment performance and process related parameters

Equipment Equipment 1
Purpose
  • Hot Embossing
  • Chip Bonding
Performance Press Plates Temperature
  • Upper Plate max temperature 285 degrees Celsius
  • Lower Plate max temperature 285 degrees Celsius
Press Plates Pressure
  • Max pressure allowed 300 kN
Process parameter range Temperature
  • 0-285 degrees Celsius
Pressure
  • 1.5-300 kN
Substrates Batch size
  • # small samples
  • # 50 mm wafers
  • # 100 mm wafers
  • # 150 mm wafers
  • # 200 mm wafers
  • # odd sized samples, contact for the machine responsible personel
Allowed materials
  • PMMA
  • TOPAS 5013-L10
  • TOPAS 8007
  • PC
  • PP
  • PCL
  • SU8
  • Graphene
  • Metals (Al,Ni....)
  • For other materials contact for machine responsible personel