Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
Appearance
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| style="background:LightGrey; color:black"|Exposure light | | style="background:LightGrey; color:black"|Exposure light | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
*405nm (laser diode | *405nm (laser diode array) | ||
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|style="background:LightGrey; color:black"|Focusing method | |style="background:LightGrey; color:black"|Focusing method | ||