Specific Process Knowledge/Thin film deposition/Physimeca: Difference between revisions
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!style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates | !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Sample size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*2 or 4" wafers | *one 2" or 4" wafers | ||
*Or several smaller pieces | *Or several smaller pieces | ||