Specific Process Knowledge/Characterization/XRD: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/XRD click here]''' | ||
=XRD at Nanolab= | |||
We have two XRD setups in building 346: | |||
*The [[/XRD_SmartLab|Rigaku SmartLab]] primarily for thin film analysis | |||
*The [[/XRD_Powder|XRD Powder setup]] primarily for analysis of bulk materials and powders | |||
== XRD SmartLab == | == XRD SmartLab == |
Revision as of 14:20, 23 March 2020
Feedback to this page: click here
XRD at Nanolab
We have two XRD setups in building 346:
- The Rigaku SmartLab primarily for thin film analysis
- The XRD Powder setup primarily for analysis of bulk materials and powders
XRD SmartLab
The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm.
The user manual(s), user APV(s), technical information, and contact information can be found in LabManager:
Software for analysis
The software packages used for data analysis are available on the equipment computer, but we recommend that you install it on your personal computer. To run the software you need a USB dongle with a license on, these can be borrowed from Rebecca and Kristian in room 347-077. We only have 9 dongles available, so when you are done please return the dongle to Nanolab.
The software can be found on "CleanroomDrive\_Equipment\XRD\Rigaku software\RILauncher", it should be possible to install the software without a dongle. To use the software you have to log in. The user is: Administrator. There is no password.
Equipment | XRD SmartLab | XRD Powder | |
---|---|---|---|
Purpose | Crystal structure analysis and thin film thickness measurement |
|
|
X-ray generator |
Maximum rated output |
3 kW |
600 W |
Rated tube voltage |
20 to 45 kV |
40 kV | |
Rated tube current |
2 to 60 mA |
15 mA | |
Type |
Sealed tube |
Sealed tube | |
Target |
Cu |
Cu | |
Focus size |
0.4 mm x 8 mm (Line/Point) |
0.4 mm x 12 mm (Line) | |
Goniometer |
Scanning mode |
incident / receiver coupled or independent |
incident / receiver coupled |
Goniomenter radius |
300 mm |
145 mm | |
Minimum step size |
0.0001° (0.36") |
0.001° (3.6") | |
Sample stage |
|
Fixed with rotation | |
Sample size |
Diameter: 150 mm Thickness: 0~21 mm |
Powders | |
Optics | Incident side |
|
|
Receiver side |
|
| |
Substrates | Substrate size |
up to 150 mm wafers |
Only for powders |
Allowed materials |
All materials |
All materials have to be approved |