Specific Process Knowledge/Thermal Process/C3 Anneal-bond furnace: Difference between revisions
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Oxidation: | Oxidation: | ||
*Dry oxidation using O<sub>2</sub> | *Dry oxidation using O<sub>2</sub> | ||
*Wet oxidation using H<sub>2</sub>O generated by a bubbler | *Wet oxidation using H<sub>2</sub>O vapour generated by a bubbler | ||
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!style="background:silver; color:black" align="center"|Performance | !style="background:silver; color:black" align="center"|Performance | ||