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| !style="background:silver; color:black;" align="left"|Purpose | | !style="background:silver; color:black;" align="left"|Purpose |
| |style="background:LightGrey; color:black"|Film thickness measurements and optical characterization of optically transparent thin films||style="background:WhiteSmoke; color:black"| | | |style="background:LightGrey; color:black"|Reflectance, transmittance and film thickness measurements optically transparent thin films||style="background:WhiteSmoke; color:black"| |
| *Measurement of (multi layer) film thickness (only one unknown layer)
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| *Optical constants
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| *Surface roughness
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| !style="background:silver; color:black" align="left"|Performance | | !style="background:silver; color:black" align="left"|Performance |
| |style="background:LightGrey; color:black"|Thin film materials that can be measured||style="background:WhiteSmoke; color:black"| | | |style="background:LightGrey; color:black"|Thin film materials that can be measured||style="background:WhiteSmoke; color:black"| |
| Any film that is transparent to the light in the given wavelength range | | Reflectance: any flat suface larger than 6mm |
| | Transmittance: any flat transparent material larger then 6mm |
| | Thin film thickness: Any film that is transparent to the light in the given wavelength range |
| ex: | | ex: |
| *Silicon Oxide | | *Silicon Oxide |
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| *SU8 | | *SU8 |
| *Other polymers | | *Other polymers |
| *Very thin layers of metals (<20 nm)
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| *and many more | | *and many more |
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| <!--
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| ==Prism Coupler==
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| [[image:Prism_coupler.jpg|300x300px|right|thumb|Prism coupler: (old image), now positioned cleanroom D-3]]
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| The Prism coupler is a Metricon model 2010 Prism Coupler. It is an old system from 1991 but the system with a few modifications is still beening manufactured today. It is still a very easy and relaible method of determining thickness and refractive index.
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| The prism coupler uses an optical waveguide technique to determine the thickness and refractive index of a thin film. To learn more about the theory of measurement please see the homepage of [http://www.metricon.com Metricon]
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| It is especially good for making fast accurate measurements of dielectric thin films with n<2.02 and a thickness range of 1 µm to about 15 µm.
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| '''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=12 Prism Coupler in LabManager]
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| <br clear="all" /> | | <br clear="all" /> |
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| ===An overview of the performance of the Prism Coupler===
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| {| border="2" cellspacing="0" cellpadding="10"
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| |-
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"|Film thickness measurements and optical characterization of optically transparent thin films||style="background:WhiteSmoke; color:black"|
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| *Measurement of film thickness
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| *Optical constants
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| |-
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| !style="background:silver; color:black" align="left"|Performance
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| |style="background:LightGrey; color:black"|Thin film materials that can be measured||style="background:WhiteSmoke; color:black"|
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| Film with a refractive index of less than 2.02 and that are transparent to the light in the given wavelength range
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| ex:
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| *Silicon Oxide
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| *Silicon nitride
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| *polymers
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| |-
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Film thickness range
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| |style="background:WhiteSmoke; color:black"|
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| *~1µm to 15 µm
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Film thickness accuracy
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| |style="background:WhiteSmoke; color:black"|
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| *±(0.5%+50Å)
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Index accuracy
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| |style="background:WhiteSmoke; color:black"|
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| *±0.001
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| !style="background:silver; color:black" align="left"|Process parameter range
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| |style="background:LightGrey; color:black"|Wavelength range
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| |style="background:WhiteSmoke; color:black"|
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| Can operate at two different wavelength:
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| *633 nm
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| *1550 nm (not working)
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| |-
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| !style="background:silver; color:black" align="left"|Substrates
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| |style="background:LightGrey; color:black"|Batch size
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| |style="background:WhiteSmoke; color:black"|
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| *One sample at a time - all sample larger than 5x5 mm<sup>2</sup>sizes up to 6"
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| |style="background:silver; color:black"|
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| | style="background:LightGrey; color:black"|Substrate material allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |-
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| |}
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| -->
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