Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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**Oculars: 0.6mm x 1.3mm (Ø1.3mm full field) | **Oculars: 0.6mm x 1.3mm (Ø1.3mm full field) | ||
**Camera: 150µm x 250µm (350µm x 250µm full field) | **Camera: 150µm x 250µm (350µm x 250µm full field) | ||
*TSA special: | *TSA special | ||
*BSA low: | **Oculars: 0.55mm x 1.1mm (Ø1.1mm full field) | ||
*BSA high: | **Camera: 150µm x 200µm (300µm x 200µm full field) | ||
*BSA low: 1.5mm x 2mm (3mm x 2mm full field) | |||
*BSA high: 450µm x 650µm (950µm x 650µm full field) | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||