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Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions

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===<span style="color:Red">EXPIRED!!! The Resist Pyrolysis furnace has been removed from the cleanroom August 2019. Use the Multipurpose Anneal furnace instead.</span>===
===<span style="color:Red">EXPIRED!
The Resist Pyrolysis furnace has been removed from the cleanroom August 2019. Use the Multipurpose Anneal furnace instead.</span>===




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[[Category: Thermal process|Resist Pyrolysis]]
[[Category: Thermal process|Resist Pyrolysis]]
[[Category: Furnaces|Resist Pyrolysis]]
[[Category: Furnaces|Resist Pyrolysis]]


== Resist Pyrolysis Furnace ==
== Resist Pyrolysis Furnace ==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_Furnace"