Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions
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[[Category: Etch (Dry) Equipment|DRIE]] | [[Category: Etch (Dry) Equipment|DRIE]] | ||
==Pegasus 4 - 150mm | ==Pegasus 4 - 150mm silicon oxide and silicon nitride etching== | ||
'''The tool is currently being installed - we hope that it will be available by early 2019. | '''The tool is currently being installed - we hope that it will be available by early 2019. | ||