Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions

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[[Category: Etch (Dry) Equipment|DRIE]]
[[Category: Etch (Dry) Equipment|DRIE]]


==Pegasus 4 - 150mm Silicon oxide and silicon nitride etching==
==Pegasus 4 - 150mm silicon oxide and silicon nitride etching==


'''The tool is currently being installed - we hope that it will be available by early 2019.
'''The tool is currently being installed - we hope that it will be available by early 2019.

Revision as of 07:52, 24 June 2019

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Pegasus 4 - 150mm silicon oxide and silicon nitride etching

The tool is currently being installed - we hope that it will be available by early 2019.


The twin Pegasi (3 and 4) have just been rolled into the lab on July 3rd 2018.
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