LabAdviser/Courses: Difference between revisions
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DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques. | DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques. | ||
Users that have to use any thin film growth and deposition tools in the cleanroom will have to sign up for the lectures before they apply for training. | Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training. | ||
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;" | {|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;" | ||
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!Schedule | !Schedule | ||
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<b>Theoretical part</b> | |||
< | '''1<sup>st</sup> lecture (2 hours):''' | ||
*An introduction to thin films | *An introduction to thin films | ||
*Material properties | *Material properties | ||
*Overview of different thin film techniques at DTU Nanolab – | *Overview of different thin film techniques at DTU Nanolab – 1<sup>st</sup> part: | ||
**Thermal oxidation | **Thermal oxidation | ||
**Electroplating | **Electroplating | ||
Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e | <i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e</i> | ||
< | '''2<sup>nd</sup> lecture (3 hours):''' | ||
*Vacuum basics | *Vacuum basics | ||
*Overview of different thin film techniques at DTU Nanolab – | *Overview of different thin film techniques at DTU Nanolab – 2<sup>nd</sup> part: | ||
*PVD (physical vapour deposition) | *PVD (physical vapour deposition) | ||
**E-beam evaporation | **E-beam evaporation | ||
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*ALD (atomic layer deposition) | *ALD (atomic layer deposition) | ||
Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf | <i>Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf</i> | ||
<b>Practical part</b> | |||
* None | * None | ||
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'''Theoretical part''' | '''Theoretical part''' | ||
* The location of the | * The location of the lectures will be notified in the doodles | ||
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!Qualified prerequisites | !Qualified prerequisites | ||
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None | * None | ||
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!Preparations | !Preparations | ||
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None | * None | ||
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!Course responsible | !Course responsible | ||
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The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk) | *The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk) | ||
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