Specific Process Knowledge/Lithography/Development: Difference between revisions

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 ===Process information===
+All recipes are single puddle.
+N50 and 546 denotes the developer used (546 is short for AR 600- 546).
+The first step is pressurizing the canister so nothing will happen visually.
+Please watch if the developer and rinsing starts. If not try to restart the machine by pressing the EMO and turning it on again.
+The spray is 8-10 s and will start the development process hence the short recipes (10s and 30s.) have been adjusted according to this.
+" have some uniformity issues but the recipes are being modified to compensate for this.
 '''Process recipes'''
-*DP 2x60s: Double puddle, 2 times 60s. Rinse and dry.
+*546 10s: 10s. Development Rinse and dry.
-*MP 4x60s: Multiple puddle, 4 times 60s. Rinse and dry.
+*546 30s: 60s. Development Rinse and dry.
-*SP 120s: Single puddle, 120s. Rinse and dry.
+*546 60s: 120s. Development Rinse and dry.
-*SP 15s: Single puddle, 15s. Rinse and dry.
+*N50 10s: 10s. Development Rinse and dry.
-*SP 30s: Single puddle, 30s. Rinse and dry.
+*N50 30s: 30s. Development Rinse and dry.
-*SP 60s: Single puddle, 60s. Rinse and dry.
+*N50 60s: 60s. Development Rinse and dry.
+*N50 90s: 90s. Development Rinse and dry.
+*N50 120s: 120s. Development Rinse and dry.
+*N50 180s: 180s. Development Rinse and dry.
+*N50 180s6": Test for changing the agitation for 6" uniformity 180s. Development Rinse and dry.
+*Testdev: The time can be modified 60s. Development Rinse and dry on AR 600-546.
+*Rinse: Rinse and dry.
 '''Utility recipes'''
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 ==Developer: TMAH Manual==