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LabAdviser/Courses: Difference between revisions

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Bghe (talk | contribs)
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'''Theoretical part'''
'''Theoretical part'''
* A 3-hour lecture. Lecture is on videos. the videos can at the moment be found here: O:\CleanroomDrive\DryEtchTPT. You can also find the slides with notes below. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. Room: 347-078
* A 3-hour lecture. Lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. The Question&Evaluation session takes place in room: 347-078


'''Practical part'''
'''Practical part'''
* A 2-3 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
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!Preparations
!Preparations
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'''Before the lecture videos'''
'''Before the Question&Evaluation session'''
*Watch the video:[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Introduction_to_Dry_Etch_Equipment-1080p.mp4 Introduction to Dry Etch Equipment]
Watch the lecture videos, see link to the videos below.


'''Before training session'''
'''Before training session'''
* Watch the training video: TPT hands-on intro: See below
* Watch the training video: TPT hands-on intro
* Watch the screen cast video's for the ASE/AOE software: See below
* Watch the screen cast video's for the ASE/AOE software
* Watch the screen cast video's for the DRIE/ICP metal and III-V ICP:  See below
* Watch the screen cast video's for the DRIE/ICP metal and III-V ICP
These are on YouTube and you can find a link to the videos below
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!Course Responsible
!Course Responsible
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The Dry Etch Group at DTU Nanolab.
The Dry Etch Group at DTU Nanolab:
Jonas Michael-Lindhard: jmli@dtu.dk
Berit Herstrøm: bghe@dtu.dk


If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].  
If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].