Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions
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===Particulates in the films=== | ===Particulates in the films=== | ||
Read about some tests that we made of particulates in e-beam evaporated Al, Ni, and TiAu films made in the Wordentec and the Temescal | Read about some tests that we made of particulates in e-beam evaporated Al, Ni, and TiAu films made in the Wordentec and the Temescal | ||
[[Specific_Process_Knowledge/Thin_film_deposition/Temescal#Particulates_on_the_films|here]]. | [[Specific_Process_Knowledge/Thin_film_deposition/Temescal#Particulates_on_the_films|'''here''']]. | ||
==Equipment performance and process related parameters Wordentec== | ==Equipment performance and process related parameters Wordentec== | ||