Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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==AFM Icon-Pt 2: Acceptance test== | ==AFM Icon-Pt 2: Acceptance test== | ||
===Noise tests=== | |||
====Sensor noise==== | |||
Tappingmode, OTESPA-R3 probe used. <br> | |||
First we made a false engage (scanning in air): | |||
Turn off gain 0 0 <br> | |||
Z range 0.2my <br> | |||
Scan size 0.01nm <br> | |||
We saw some 50Hz noise (electrical - or maybe pumps): Rq 15 pm (specs 35pm) <br> | |||
[[File:SensorNoise.jpg|thumb|left|400px]] <br clear="all" /> | |||
====System noise==== | |||
Noise on sample: scan size 0.1nm <br> | |||
we started with 1my scan size to optimize the scan. <br> | |||
2.43Hz <br> | |||
256 lines <br> | |||
Z range at 2my to get sub nanometer resolution in Z <br> | |||
Rq: 54,5pm (plade vibrator koerte udenfor) <br> | |||
Rq: 23pm uden vibrator koerende + ro og med aaben hood. <br> | |||
Rq:71pm uden vibrator koerende + ro og med lukket hood <br> | |||
[[File:SystemNoise.jpg|thumb|left|400px]][[File:systemNoise_open_closed_hood.jpg|thumb|left|400px]] | |||
<br clear="all" /> | |||