Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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*A symmetric chuck that handles up to 210mm wafers and 15mm thick | *A symmetric chuck that handles up to 210mm wafers and 15mm thick | ||
*An asymmetric chuck that handles up to ~4" wafer (but not small pieces) - using this a whole 4" can be accessed without rotating the sample. | *An asymmetric chuck that handles up to ~4" wafer (but not small pieces) - using this a whole 4" can be accessed without rotating the sample. | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" valign="top"| | ||
*A symmetric chuck that handles up to 210mm wafers and 15mm thick | *A symmetric chuck that handles up to 210mm wafers and 15mm thick | ||
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