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| <br clear="all" /> | | <br clear="all" /> |
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| ===Extra chuck===
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| '''We have two chucks:'''
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| *A symmetric chuck that handles up to 210mm wafers and 15mm thick
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| *An asymmetric chuck that handles up to ~4" wafer (but not small pieces) - using this a whole 4" can be accessed without rotating the sample.
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| ===Holders===
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| *Magnetic sample holder + magnetic discs + double sided tape
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| *Holder for vertical profile scans
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| ===Modes included===
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| *ScanAsyst
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| *TappingMode (air)
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| *Contact Mode
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| *Lateral Force Microscopy
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| *PhaseImaging
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| *Lift mode
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| *MFM
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| *Force Spectroscopy
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| *Force volume
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| *EFM
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| *surface potential
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| *Torsional Resonance Mode
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| *Piezoresponse Microscopy
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| *Force spectroscopy
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| '''Extra modes:'''
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| *PeakForce KPFM package (incl extra box for high voltage PF KPFM)
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| *PFQNM package
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| *Microscope Image Registration and Overlay (MIRO) software. '''this is only working in the old software (before version 9.4)'''
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|
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| ===Probes===
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| Probes that followed the system (we may not have them anymore!)
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| {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
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| |-
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| |-
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| |-style="background:silver; color:black"
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| !
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| !ScanAsyst mode
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| !Tapping mode
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| !Contact mode
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| !PF-KPFM
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| |-
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| !Generel description
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| |Generel description
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| |Generel description
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| |-
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| |-
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| |-style="background:LightGrey; color:black"
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| !Probes that followed the system
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| *ScanAsyst air 30ps
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| *ScanAsyst fluid 10ps
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| *ScanAsyst fluid + 10ps
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| *MPP-11100-10
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| *MPP-21100-10
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| *MPP-11120-10 RTESPA
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| *TESPA-V2 10ps
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| *OTESPA-R3 10ps
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| *High Aspect ratio probes 1:15: FIB6-400A 5ps
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| *MPP-12120 10ps. Tap150A
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| *MPP-13120-10 TAP525A
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| *SNL-10 20ps
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| *SCM-PIT 10ps
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| *PFQNE-Al 10ps
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| |-
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| |}
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| <br clear="all" />
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| ===Samples===
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| *QC grid: VGRP-15M 10µm pitch and depth reference 178nm
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| *PF KPFM-SMPL Kelvin probe Sample: Al + Au on Si
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| '''Calibration samples for getting quantitative modulus measurements:'''
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| #PDMS-soft-1-12M: PDMS gel 2.5MPa
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| #PDMS-soft-2-12M: PDMS gel 3.5MPa
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| #PSFilm-12M: Polystyrene filem
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| #FSilica-12M: Fused Silica
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| #Sapphire-12M: Sapphire
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| #RS-12M: Ti roughness sample
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| #HOPG-12M: Highly Orientated Pyrolytic Graphite
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| #PS-LDPE: Harmonix training
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| *HOPG: Highly Oriented Pyrolytic Graphite
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| ==AFM Icon-Pt 1: Acceptance tests done== | | ==AFM Icon-Pt 1: Acceptance tests done== |
